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冯文赫博士学术报告会-8月8日
2016-08-04
报告时间：8月8日 15:00
报告地点：光学楼525室
题目：Precision glass microstructuring using Femtosecond Laser Induced Chemical Etching (FLICE)
Abstract:
Femtosecond laser induced chemical etching (FLICE) is a micro-fabrication technique that allows versatile production of 3D structures in glass. In this study, an alternative FLICE technique that employed potassium hydroxide (KOH) was developed. A laser processing recipe for fused silica glass was established in the first place. Laser pulse energy, pulse duration, repetition rate and etching controls were among the key parameters to fulfil criteria such as high etch rate or the selectivity. A surface fabrication route was then developed to allow surface and in-bulk structures to be manufactured, and finally a CAD/CAM approach was set up to pattern arbitrary 3D geometries and realise the designs. The findings of this research are also addressed to provide a better understanding of the FLICE mechanisms as well as to develop a FLICE process feasible for industrial glass MEMS fabrication that offers simplicity and high precision in a safe environment.
Introduction of the speaker:
Dr Wenhe Feng （冯文赫） graduated from the Centre for Industrial Photonics, Institute for Manufacturing, University of Cambridge under supervision of Professor Bill O’Neill after obtaining BSc degree in Optical Science & Engineering from Fudan University in 2010 and MRes degree in Photonics Systems Development from University of Cambridge in 2011. His research focussed on the femtosecond laser induced chemical etching (FLICE) technique and ultrafast laser micromachining via direct ablation.